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Custom Automation Case Studies

Semiconductor

PVD Process Tool

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Semiconductor

Nano-Imprint Tool

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Semiconductor

Wafer Vertical Furnace

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Semiconductor

OLED Display Process Module

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Semiconductor

300mm Wafer Heating & Cooling Stations

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Renewable Energy

Custom Equipment for CIGS Manufacturing Process

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Renewable Energy

Solar Diffusion Furnace Boat Load System

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Data Storage

Hard Disk Drive Media Custom Cleaning

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Data Storage

Hard Disk Drive Media Scrubber

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Semiconductor

Semiconductor Vacuum Wafer Transfer Robot

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Semiconductor

300mm Semiconductor Load Port

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Semiconductor

Semiconductor Cleaning Automation

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Semiconductor

Wafer Vacuum Metrology Platform (Modular)

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Semiconductor

Wafer CO2 Cleaning Automation

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Semiconductor

Atlas Metrology Automation Platform

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Semiconductor

Wafer Vacuum Metrology Platform (Cluster)

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Semiconductor

Wafer Macro Defect Inspection Module

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Semiconductor

Atlas 450 Metrology Automation Platform

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Semiconductor

Wafer Transfer Mechanisms

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Semiconductor

Wafer Probe Automation Platform

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Semiconductor

Bonded Wafer and Metrology Defect Review System

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Semiconductor

Wafer Bonding System

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Semiconductor

Micro4PP Metrology Automation Platform

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