CASE STUDIES

Wafer Vacuum Metrology Platform (Modular)

The Situation

New metrology technology needed to be implemented in a cost effective, modular architecture that met the highest standards for semiconductor factory automation.

The Challenge

Metrology technology required high vacuum environment. High vacuum pumping system needed to be packaged into a small footprint.

The Solution

Owens partnered with the client to implement a unique approach to vacuum wafer handling automation. Tool footprint and cost dramatically reduced.

Wafer Vacuum Metrology Platform
Wafer Vacuum Metrology Platform Modular