OLED Display Process Module

Situation

An equipment manufacturer for next generation display technology needed to complete their system development on an expedited timeframe to support their business development goals.

Problem

Large substrate (1.5 m x 1.8 m, Gen 6); very tight requirements for particulates and contamination; 16 week lead-time.

ODI Role

• Designed a three chamber stacked system that accommodated multiple process chamber configurations.
• Designed chambers to meet particulate and inert gas environment.
• Delivered module on-time to support technology evaluation.
• Added manufacturing clean room space and labor to support ramp.