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Owens Design

Engineering, Technical Manufacturing and Program Management

CASE STUDIES

Semiconductor Platform for Metrology and Inspection

Owens Design partners with semiconductor OEMs to design and build fully automated equipment for advanced semiconductor fabs world-wide. We integrate our customers’ proprietary metrology or inspection technology into our semi-custom platform consisting of wafer handling, staging, and environmental controls to create a fully automated system.

Business Proposition

Developing new metrology or inspection technologies for an advanced semiconductor fab is a very complex endeavor requiring specialized knowledge and significant capital expense. Owens Design reduces the development expense and risk to develop these complex systems by providing a customizable system platform and a complete manufacturing infrastructure for on-going system manufacturing including changes, configuration management, reliability, and cost reduction. We have integrated more metrology and inspection technology systems for leading semiconductor original equipment manufacturers than any other engineering firm worldwide.

Operator loading FOUP onto custom EFEM

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Metrology system integrated to third party EFEM

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Metrology systems in final test at Owens’ facility

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Air bearing stage achieves submicron accuracy

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Wafer heating chamber used for pre-processing

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Rendition of modular high vacuum metrology cluster tool

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Custom R-Theta-Z stage integrated to high mag microscope

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Bonded wafers require specialized handling techniques

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Dual paddle robot placing wafer to vision based aligner

Technical Details

Owens Design has developed a customized platform to meet the specific requirements of our customer’s measurement technology. The platform includes wafer handling, staging, contamination and environment control, integration of our customer’s measurement sub-system, and final system test and shipment.

  • Wafer handling system and manage special configurations
    • EFEM, FOUP, SMIF, Wafer ID
    • All substrate types & sizes, thinned wafers, unusual form factors
    • All end effector types, vacuum, edge, flipping, non-contact
  • Develop or integrate third party wafer staging system
    • High precision (sub-micron), air bearing, linear or rotary scanning, vacuum
    • Customized platen design, backside contamination control
  • Environmental control systems
    • Vibration control (passive & active), clean air (ISO Class 1), cleanliness, temperature, light
  • Integrate measurement sub-system
    • Optical, electrical, magnetic, related data acquisition and processing sub-systems
  • System Software, HMI, Calibration, Maintenance Utilities and Field Support Documentation
  • Full system integration, testing, configuration management, and drop shipment to end-user fab
  • Regulatory compliance (Semi, I300I, CE)

Testimonial

“Our collaboration with Owens Design has resulted in an industry-leading tool with excellent performance parameters and a low cost of ownership that make it extremely attractive to our customers.”

Henrik Bækbo, CTO, Capres A/S

  • Services
    • Product Design & Build
    • Difficult-to-Outsource Manufacturing
    • Factory Equipment Design & Build
  • Markets
    • Semiconductor and Display Capital Equipment
    • Medical Device
    • Solar and Energy Storage
    • Data Storage
    • Emerging Technologies
  • Applications Expertise
    • Laser Process Development
    • Materials Handling
    • Process Technology Integration
    • Control Systems and Software
    • Flexible Manufacturing
  • About Us
    • Our Team
    • Career Opportunities
    • Blog • News & Events
    • Contact Us
    • Privacy Policy
  • Home
  • Case Studies
    • Wafer Flipper Module for Manufacturing Processes
    • Wafer Heat and Cool Stations
    • Semiconductor Platform for Metrology and Inspection
    • Phased Automation Strategy for Emerging Technology
    • Rapid Production Ramp in Solar Cell Processing
    • Expertise in Medical Technology Manufacturing
    • Enabling Volume Manufacturing for Hard Disk Drive Media
    • Optimizing Production Line for Assembly and Test
    • Product Upgrades for Film Frame Handling

Contact Information

Owens Design
47427 Fremont Blvd.
Fremont, CA 94538
Get Directions ›

T: 510.659.1800
F: 510.659.1896
Sales: 510.770.8479
sales@owensdesign.com

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