Semiconductor Platform for Metrology and Inspection

Owens Design has developed a customized platform to meet the specific requirements of our customer’s measurement technology. The platform includes wafer handling, staging, contamination and environment control, integration of our customer’s measurement sub-system, and final system test and shipment.

• Wafer handling system and manage special configurations
  • EFEM, FOUP, SMIF, Wafer ID
  • All substrate types & sizes, thinned wafers, unusual form factors
  • All end effector types, vacuum, edge, flipping, non-contact
• Develop or integrate third party wafer staging system
  • High precision (sub-micron), air bearing, linear or rotary scanning, vacuum
  • Customized platen design, backside contamination control
• Environmental control systems
  • Vibration control (passive & active), clean air (ISO Class 1), cleanliness, temperature, light
• Integrate measurement sub-system
  • Optical, electrical, magnetic, related data acquisition and processing sub-systems
• System Software, HMI, Calibration, Maintenance Utilities and Field Support Documentation
• Full system integration, testing, configuration management, and drop shipment to end-user fab
• Regulatory compliance (Semi, I300I, CE)