Vacuum Platform System Design – Motion in Vacuum
This seminar is complimentary to our Guests.
Tuesday, May 22nd, 2018
8:30 AM – 11:30 AM
Owens Design, 47427 Fremont Blvd., Fremont, CA | Map It
In today’s most advanced processes, vacuum environments are required. Semiconductor, display and other industries are pushing the technology boundaries for material handling in and out of vacuum environments while maintaining vacuum integrity. Another evolving challenge of vacuum system design is precision motion under vacuum conditions. We will address both of these challenges in our upcoming seminar.
For this seminar, we have invited three speakers who are intimately familiar with transferring product in and out of vacuum chambers while maintaining vacuum integrity. Our first speaker, Tom Swain from VAT, will discuss the challenges in moving substrates into and out of vacuum systems. Our second speaker Paul Shufflebotham and third speaker Tony Smith (both from Owens Design engineering), will talk about how to move and interface with components inside the vacuum system during normal operation, as well as system level design for vacuum platforms.
If you have projects that require vacuum design and would like to learn more about best practices to address motion in vacuum systems, this would be a great seminar to attend. Come and join us and learn from these industry experts.
Who should attend?
- Design Engineers
- Engineering Management
- Application Engineers
- Manufacturing Engineers
- Quality Managers
- Product & Ops Managers
Part 1: Transporting Materials into and out of Vacuum Chambers
(Presented by Tom Swain)
- Design considerations when working with material transport into vacuum
- How to choose the right components
- Case studies
Part 2: Vacuum System Design Considerations for In Vacuo Motion
(Presented by Paul Shufflebotham and Tony Smith)
- Vacuum Refresher/Important concepts for vacuum motion system
- Moving stuff in & out of vacuum systems
- Moving stuff within vacuum systems
- Case studies
- Q & A
Tom has been involved with vacuum system design for over 30 years. He was a staff scientist at Lawrence Berkeley National Laboratory and worked on ultra-high vacuum (UHV) applications. Currently Tom works at VAT as an application engineer and provides vacuum solutions to many Bay area companies.
Paul Shufflebotham, PhD
Paul has a PhD in plasma deposition of thin films and has worked for Lam Research, Novellus Systems, KLA-Tencor, MiaSole and LensVector before joining Owens Design in 2016 as VP of Engineering. Paul has developed, or led the development of, plasma deposition, etch and hydrogenation processes; plasma source, chamber, electrostatic chuck and in-situ metrology hardware.
Tony Smith, PE
Mr. Smith has over 20 years of experience in automation design in the semiconductor, consumer electronics, disk drive and solar industries among others. As Director of Engineering at Owens Design, he has managed the integration of complex, high precision motion systems into vacuum equipment. Tony has been with Owens Design for over 18 years with a BS in Mechanical Engineering from Cal Poly San Luis Obispo and an MS from Santa Clara University.
Seminar Sign Up
Please register for our upcoming technical seminar.