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Semiconductor Industry

SOLUTION SET: Element Turnkey Metrology Automation Platform

The Element automation platform is a turnkey solution that enables an OEM to rapidly and cost-effectively develop and deploy a semiconductor “fab ready” metrology or inspection based tool. The automation platform consists of a full wafer handling system integrated with the OEM’s choice of staging and fab proven software. The platform has been designed for quick customization to meet the unique requirements of the OEM’s metrology or inspection process.

Platform Benefits
  • Integrated hardware with fab proven software
  • Reduce development time by six to nine months
  • Reduce product cost by up to $40,000
Platform Features

Fastest Timeline to Fab Deployment
For companies seeking the fastest timeline to developing and deploying their technology into leading semiconductor fabs, the Element is the perfect solution. Using the Element platform will cut six to nine months out of the development cycle—time that is no longer needed to design the automation platform and integrate control software. This allows your team to focus solely on developing your unique measurement technology.

Lowest Cost to Product Launch
Developing a new semiconductor tool is an expensive proposition. Industry research shows less than 20% of a typical engineering teams effort is spent on developing their core technology. The Element platform dramatically reduces your R+D investment and allows you to spend your money where it counts! Element’s unique integrated approach can reduce platform costs up to $40,000 compared to alternative solutions.

Reduce Risk of Failure
Semiconductor fabs are notoriously risk averse. A new technology may only have one shot at proving itself and being adopted as the process of record. Given the high stakes, working with experts in platform hardware and software development provides you with confidence that your first shot will be your best shot. You know your measurement or inspection technology will get a full and complete evaluation without having to overcome platform reliability and compliance issues. The Element platform was designed by experts that have delivered multiple Metrology Automation Platforms into leading edge semiconductor fabs. In addition, the PeerGroup PTO Software was awarded Semiconductor International’s Editor’s Choice award in 2007 and has been deployed in fabs worldwide.

Robust Automation Software
By way of our automation software partner, PEER Group, we offer an optional software application that executes all 300mm SEMI automation standards and has many fab-specific operational scenarios already built-in. Additional simulation testing results in trouble-free fab installation and fast customer acceptance. The PEER Tool Orchestrator™ (PTO) won the Semiconductor International Best Product award in 2007. Visit the PEER Group website to learn more about wafer transport robotics software.

Specifications

Wafer Sizes Repeatability (measured at wafer hand-off location) System Throughput Cleanliness Reliability Interface / Facilities Regulatory Compliance
Additional Information

Solution Sets
Metrology Automation Platform

Brochure
Element Brochure

Solution Sets: Semiconductor

Industries / Markets

Semiconductor
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“Owens Design provided ACLARA with important engineering and manufacturing expertise to expedite the development of our Plurex Multiplexing System. We are pleased to have Owens Design as a partner.”

Dan Morrow, VP of Operations
ACLARA BioSciences
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