SOLUTION SETS: Semiconductor

1. ELEMENT - Turnkey Metrology Automation Platform
The Element automation platform is a turnkey solution that enables OEMs to rapidly and cost-effectively develop and deploy a semiconductor fab ready metrology tool. The automation platform consists of a full wafer handling system integrated with the OEM's choice of staging and fab proven software.

2. Atlas Metrology Automation Platform
Owens Design has developed a standard metrology automation platform that is designed to accommodate a variety of metrology process components. The use of a standardized tool platform drastically reduces overall tool development cost and time.

3. Wafer Heat and Cool Stations
Owens Design has developed a 300 mm wafer heat and cool station that provides excellent uniformity and industry leading backside contamination.

4. Wafer Transfer Mechanisms
Unique or challenging wafer handling requirements often cannot be met with off-the-shelf solutions. Owens Design has a family of custom wafer handling mechanisms for these special situations.

5. BOLTS SEMI Standard Interface
The BOLTS interface provides a convenient standardized interface available on virtually all 200/300mm process and metrology platforms.

6. 6" Wafer Conversion Kit for Spartan EFEM
Emerging technology companies serving the MEMS, Power and related markets require robust and cost effective wafer handling platform that can support a full range of wafer form factors. These markets demand a standard platform that can be easily modified for 6 inch to 300mm wafer handling.

7. Wafer Flip Module
The increasing need for backside contamination inspection require wafers to be loaded to the process or inspection chamber in a 90 or 180 degree flipped orientation. Owens Design has developed a robust and compact wafer flipper module that can accurately orient the substrate in a fast, clean, and reliable manner.

8. ATE Calibration Robot: R-Theta
As ATE pin counts increase and timing requirements become more stringent Validation and Focused Calibration are best performed by a Calibration Robot.

9. ATE Calibration Robot: Cartesian Format
The calibration robot provides an automated solution to validate and calibrate test signals on automatic test equipment. This X-Y robot is optimized for small size, portablility and high speed.

10. ATE Calibration Robot: High Accuracy
High frequency measurements, high pin densities, and large test heads, demand a High Accuracy Calibration Robot.