CASE STUDY: Wafer Vacuum Metrology Platform (Modular)
The Situation
New metrology technology needed to be implemented in a cost effective, modular architecture that met the highest standards for semiconductor factory automation.
The Challenge
Metrology technology required high vacuum environment. High vacuum pumping system needed to be packaged into a small footprint.
The Solution
Owens partnered with the client to implement a unique approach to vacuum wafer handling automation. Tool footprint and cost dramatically reduced.
