CASE STUDY: Micro4PP Metrology Automation Platform
The Situation
Capres A/S had developed a revolutionary microscopic Four-Point Probe (4PP) with an electrode pitch three orders of magnitude smaller than conventional four-point probes. The Micro4PPs are fabricated using silicon micro-fabrication technology. The Micro4PP is perfect for addressing critical problems with ion implantation given their micro-scale resolution. While the technology was compelling, large semiconductor fabs are only interested in a complete solution. Capres A/S needed to provide their technology in a 300 mm fully automated system to capitalize on their innovative technology.
The Challenge
As a technology startup, Capres A/S needed to maintain their focus on delivering their unique technology and understanding the customer’s applications. Developing a fully 300 mm compliant automation platform is a complex undertaking that would have diverted critical resources. Capres A/S chose to partner with Owens Design as their development and manufacturing partner to provide a complete solution to their customers.
The Solution
Owens Design worked closely with Capres A/S to understand their technology’s unique requirements. Then, drawing on a depth of experience in semiconductor automation, Owens Design developed a metrology platform that met Capres A/S’ precise needs. The solution included air bearing staging, vibration isolation, clean air flow, EFEM selection, end effector design, frame, panels, and electrical packaging. The design fully met SEMI requirements for safety and factory automation.
Additional Information
Case Studies
Micro4PP Metrology Automation Platform 
